Thin film electrodes and thin film capacitors
All-Inorganic Flexible Embedded Thin-Film Capacitors for …
In this work, the all-inorganic flexible dielectric film capacitors have been obtained. The flexible capacitors show a desirable recoverable energy density ( Wrec) of …
Thin Film Multilayer Capacitors | SpringerLink
Thin film capacitors of ~1,000 nm thickness have recently been studied in terms of film behavior for specific device application such as piezoelectric thin films for microelectromechanical systems ... Srinivasan S (2005) Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications ...
Toward Advanced High‐k and Electrode Thin Films for DRAM Capacitors …
Atomic layer deposition (ALD) is a key technique that enables the growth of functional thin films for DRAM capacitors; thus, recent advances in the deposition of high‐k and electrode thin films ...
Transparent, flexible supercapacitors from nano …
Here we construct mechanically flexible and optically transparent thin film solid state supercapacitors by assembling nano-engineered carbon electrodes, prepared in porous templates, with...
Preparation of Pt-PtOx thin films as electrode for memory capacitors ...
The musty odor compound geosmin was electrochemically detected by using Pt nanoparticle-embedded nanocarbon (Pt-C) films formed with unbalanced magnetron (UBM) co-sputtering with Computational experiments revealed that the theoretical oxidation potential (Eox) value for geosmine was relatively similar to that …
Effects of electrodes on antiferroelectricity and fatigue endurance …
The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf 0.2 Zr 0.8 O 2 thin films has been studied by a metal–antiferroelectric–metal capacitor structure using TiN and W as electrodes. The W|Hf 0.2 Zr 0.8 O 2 |W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the …
What is a Film Capacitor and Different Types of Film Capacitors …
A Thin Film Capacitor is nothing but bipolar capacitors with plastic films as their dielectric. These films are either metalized or just placed in layers to form out a roll or a candy-like the rectangular shape. ... to burn away any existing defects on the surface of the electrodes. Since the capacitors can get easily affected by moisture, the ...
DC reactively sputtered TiNx thin films for capacitor electrodes ...
With the rapid development of metal–oxide–semiconductor field effect transistor (MOSFET) and dynamic random access memory (DRAM) structures, TiN thin film has been introduced as metal gate and capacitor electrodes owing to its high thermal and chemical stability, low resistivity and low-running cost [1, 2].Recently, great efforts have been expended in …
Enhanced remnant polarization in ferroelectric Hf0.5Zr0.5O2 thin film ...
Hence, it is important to investigate and understand the different capping electrode materials in HZO thin film capacitors other than TiN. Numerous studies have investigated alternative capping electrodes, including Pt [35, 36], Ru [37], W [19], RuO 2 [38], TaN, and Mo, with the aim of enhancing the ferroelectric (FE) properties of HZO. …
Ultra-high areal capacitance and high rate capability RuO2 thin …
Clearly, the technology developed in this study leads to very high capacitance values (∼ 4.5 Fcm −2) compared to literature data on 2D thin and thick film …
Synthesis and performance of TiN film electrode for …
Transition metal nitrides are recognized as an important electrode material for supercapacitors owing to their high corrosion resistance, good chemical and electrochemical stability, and electronic structure similar to transition metals. Here, we have successfully prepared the TiN thin films for supercapacitor electrodes without binder by …
Imprint and oxygen deficiency in (Pb,La)(Zr,Ti)O3 thin‐film capacitors ...
See, for example, Proceedings of the 4th International Symposium on Integrated Ferroelectrics, edited by C. A. Paz de Araujo, University of Colorado, Monterey, CA, March 1992; Mater.
Frequency and temperature-dependent dielectric properties of …
Thin film capacitors with BaTiO 3 as dielectric and RuO 2 as electrode material have been prepared by rf-magnetron sputtering at temperatures up to 750 °C and under various oxygen partial pressures. They have been analyzed by complex impedance spectroscopy in the temperature range 20–200 °C.At about 10 kHz, the grain effect is …
High-performance La-doped BCZT thin film capacitors on …
As a representative, Fig. 2 shows the cross-sectional SEM images of the La-doped BCZT thin films at x = 0.075 deposited on the Pt bottom electrodes and the La-doped BCZT thin films at x = 0.15 deposited on the LaNiO 3 /Pt composite bottom electrodes. The thickness of both two samples is about 280 nm, indicating that the effect …
Self-assembled three-dimensional and compressible …
It is challenging to construct three-dimensional thin-film energy-storage devices. Here the authors present supercapacitors and …
Nanostructured carbon-based electrodes: bridging the gap between thin ...
The fast evolution of portable electronic devices and micro-electro-mechanical systems (MEMS) requires multi-functional microscale energy sources that have high power, high energy, long cycle life, and the adaptability to various substrates. Nanostructured thin-film lithium-ion batteries and electrochemical
Electrical Conduction in Thin-Film Polypropylene Capacitors
Thin polypropylene films have played a strategic role in recent years because they are the dielectric of choice for high-energy-density and high-power-density DC-link capacitors, and have been extensively used in renewable energy and electric mobility applications. Currently, these capacitors operate at temperatures of up to 105 °C with …
The Effect of Deposition Temperature on TiN Thin Films for the ...
The TiN thin film is considered a promising electrode layer for 3D capacitors. In this study, TiN thin films were prepared on Si substrates using atomic layer deposition (ALD) at various temperatures from 375 °C to 475 °C. The crystallization behavior, microstructure, and conductance properties of those TiN thin films were …
Thin-Film Electrode-Based Supercapacitors
Thin-film electrodes (TFEs), which consist of a layer of active material with a thickness ranging from nanometers to micrometers, have been widely …
Design and performance evaluation of 2D nickel oxide nanosheet …
5 · This research comprehensively investigates the structural, optical, and electrochemical properties of nickel oxide (NiO) nanoparticles, focusing on its potential …
Toward Advanced High
In this regard, technological advances in the fabrication of capacitors are of great importance; accordingly, the materials and processing of high-k thin films require developmental innovations. Besides, it is necessary to develop electrode materials that optimize the function of high-k thin films. In this review, recent advances in achieving ...
Magnetron sputtered TiN thin films toward enhanced performance ...
Supercapacitors as a new type of energy storage devices bridging the gap between conventional capacitors and batteries have aroused widespread concern. Herein, binder-free titanium nitride (TiN) thin film electrodes for supercapacitors prepared by reactive magnetron sputtering technology are reported. The effect of N2 content on the …
Dead layer effect and its elimination in ferroelectric thin film with ...
Chang et al. [21] demonstrated that an inherent dead layer appears in the SrTiO 3 single crystal thin film capacitor with Pt electrodes, while it does not exist in an analogous structure involving BaTiO 3. Therefore, there seems to be a conflict between the theoretical and experimental work. In specific, the experimental results from different ...
Thin-Film Electrode-Based Supercapacitors
Thin-film electrodes (TFEs), which consist of a layer of active material with a thickness ranging from nanometers to micrometers, have been widely explored in …
Self-assembled three-dimensional and compressible interdigitated thin ...
It is challenging to construct three-dimensional thin-film energy-storage devices. Here the authors present supercapacitors and batteries based on layer-by-layer self-assembly of interdigitated ...
Multilayer thin film capacitors by selective etching of Pt and Ru ...
However, many of the recently reported multilayer capacitor thin film fabrication methods are disadvantageous in that the electrode layers are connected through a series of vias [6], [7]. Therefore, the fabrication process is very cumbersome and adds a significant number of processing steps, increasing the probability of device failure and the ...
Superior-performance TiN films sputtered for capacitor electrodes ...
Titanium nitride (TiN) thin films were deposited on Si (100) substrate by direct current reactive sputtering without and with the application of a substrate bias. The aim of this work was to clarify the effects of substrate bias on film properties systematically. The results showed that the substrate bias process changed the film growth regime, and …
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